Licensed Professional Engineer:
CT License #24868
Education
Ph.D. in Mechanical Engineering, MIT, 1995 Precision Engineering Research Group
MSME UT Austin, 1992 Robotics Research Group
BSME UT Austin, 1990
Professional Affiliations:
American Society for Precision Engineering (ASPE)
American Society of Mechanical Engineers (ASME)
Institute of Electrical and Electronics Engineers (IEEE)
IEEE Robotics and Automation Society
Patents:
WO/2009/130011 (Pending) Robot for In-vacuum Use. Lansbergen, Harrold, Van Doren
7,869,003. Lithographic apparatus and device manufacturing method with reticle gripper.
Van Doren, Feroce.
6,876,453 (WO03102495) Metrology System for Precision 3D Motion. Van Doren, Kuechel,
Evans.
5,733,096 (WO9710078) Multi-stage Telescoping Structure. Van Doren, Matthew;
Slocum, Alexander; Sauer, Don.
5,733024 (WO9711623) Modular System. Slocum, Alexander; Van Doren, Matthew J.;
Ziegenhagen, Rodney; Sauer, Don.
5,700,046 (WO9710082) Wafer Gripper. Van Doren, Matthew; Sauer, Don, Slocum,
Alexander; Pap Rocki, David, Tam; Johan; Gerzerski, Larry.
WO9710079 Concentric Dual Elbow, Van Doren, Matthew J.
Selected Publications & Presentations:
Matthew Van Doren, William Dornfeld, and Eric Marsh, "Flexure-based, Parallel Nano-
Positioning Robot," ASPE Annual Meeting, Nov 2011, Denver, CO.
Eric Marsh, Alex Moerlein, Theodore Deakyne, and Matthew Van Doren, "In-Process
Measurement of Form Error and Force in Cylindrical Plunge Grinding," Precision
Engineering, Volume 32, Issue 4, 10/2008. Pp. 348-352.
Eric Marsh, Dave Arneson, Matthew Van Doren, and Scott Blystone, “Interferometric
Measurement of Workpiece Flatness in Ultra-Precision Flycutting” Sensor Review;
Volume 26 Issue 3; 2006. Pp. 209-217.
ER Marsh, DA Arneson, MJ Van Doren, SA Blystone, "The Effects of Spindle Dynamics on
Precision Flycutting," American Society for Precision Engineering (ASPE) 2005 Annual
Meeting, 2005.
Mtich Pryor, Matthew Van Doren, and Delbert Tesar. “Manipulator Performance Criteria
Based on Kinematic, Dyanmic, and Compliance Models” Proceedings of the 1999 ASME
Design Engineering Technical Conference. Sept. 12-15, 1999, Las Vegas, Nevada.
Matthew Van Doren and Alexander Slocum. “Design and Implementation of a Precision
Material Handling Robot Control System” International Journal of Machine Tools and
Manufacture: Design, Research, and Application. Vol. 35, No. 7. July, 1995. Pp. 1003-
1014.
Van Doren, Matthew. “Precision Machine Design for the Semiconductor Equipment
Manufacturing Industry,” Ph.D. Thesis, Massachusetts Institute of Technology, May 1995.
Van Doren, Matthew. “Development of a Precision Machine Design Methodology for the
Semiconductor Equipment Manufacturing Industry” SEMATECH sponsored ARTWORK IV
Conference, Cambridge, MA, October 21, 1993.
Van Doren, Matthew. “Criteria Development Software to Support Decision Making
Software for Modular, Reconfigurable Robotic Manipulators,” Master’s Thesis, The
University of Texas at Austin, May, 1992.
Van Doren, Matthew and Tesar, Delbert. “Criteria Development Software to Support
Decision Making Software for Modular, Reconfigurable Robotic Manipulators,” Report to
DOE under Grant #DE-FG02-86NE37966, March, 1992.
CT License #24868
Education
Ph.D. in Mechanical Engineering, MIT, 1995 Precision Engineering Research Group
MSME UT Austin, 1992 Robotics Research Group
BSME UT Austin, 1990
Professional Affiliations:
American Society for Precision Engineering (ASPE)
American Society of Mechanical Engineers (ASME)
Institute of Electrical and Electronics Engineers (IEEE)
IEEE Robotics and Automation Society
Patents:
WO/2009/130011 (Pending) Robot for In-vacuum Use. Lansbergen, Harrold, Van Doren
7,869,003. Lithographic apparatus and device manufacturing method with reticle gripper.
Van Doren, Feroce.
6,876,453 (WO03102495) Metrology System for Precision 3D Motion. Van Doren, Kuechel,
Evans.
5,733,096 (WO9710078) Multi-stage Telescoping Structure. Van Doren, Matthew;
Slocum, Alexander; Sauer, Don.
5,733024 (WO9711623) Modular System. Slocum, Alexander; Van Doren, Matthew J.;
Ziegenhagen, Rodney; Sauer, Don.
5,700,046 (WO9710082) Wafer Gripper. Van Doren, Matthew; Sauer, Don, Slocum,
Alexander; Pap Rocki, David, Tam; Johan; Gerzerski, Larry.
WO9710079 Concentric Dual Elbow, Van Doren, Matthew J.
Selected Publications & Presentations:
Matthew Van Doren, William Dornfeld, and Eric Marsh, "Flexure-based, Parallel Nano-
Positioning Robot," ASPE Annual Meeting, Nov 2011, Denver, CO.
Eric Marsh, Alex Moerlein, Theodore Deakyne, and Matthew Van Doren, "In-Process
Measurement of Form Error and Force in Cylindrical Plunge Grinding," Precision
Engineering, Volume 32, Issue 4, 10/2008. Pp. 348-352.
Eric Marsh, Dave Arneson, Matthew Van Doren, and Scott Blystone, “Interferometric
Measurement of Workpiece Flatness in Ultra-Precision Flycutting” Sensor Review;
Volume 26 Issue 3; 2006. Pp. 209-217.
ER Marsh, DA Arneson, MJ Van Doren, SA Blystone, "The Effects of Spindle Dynamics on
Precision Flycutting," American Society for Precision Engineering (ASPE) 2005 Annual
Meeting, 2005.
Mtich Pryor, Matthew Van Doren, and Delbert Tesar. “Manipulator Performance Criteria
Based on Kinematic, Dyanmic, and Compliance Models” Proceedings of the 1999 ASME
Design Engineering Technical Conference. Sept. 12-15, 1999, Las Vegas, Nevada.
Matthew Van Doren and Alexander Slocum. “Design and Implementation of a Precision
Material Handling Robot Control System” International Journal of Machine Tools and
Manufacture: Design, Research, and Application. Vol. 35, No. 7. July, 1995. Pp. 1003-
1014.
Van Doren, Matthew. “Precision Machine Design for the Semiconductor Equipment
Manufacturing Industry,” Ph.D. Thesis, Massachusetts Institute of Technology, May 1995.
Van Doren, Matthew. “Development of a Precision Machine Design Methodology for the
Semiconductor Equipment Manufacturing Industry” SEMATECH sponsored ARTWORK IV
Conference, Cambridge, MA, October 21, 1993.
Van Doren, Matthew. “Criteria Development Software to Support Decision Making
Software for Modular, Reconfigurable Robotic Manipulators,” Master’s Thesis, The
University of Texas at Austin, May, 1992.
Van Doren, Matthew and Tesar, Delbert. “Criteria Development Software to Support
Decision Making Software for Modular, Reconfigurable Robotic Manipulators,” Report to
DOE under Grant #DE-FG02-86NE37966, March, 1992.
Matthew J. Van Doren Bio
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