Matthew J Van Doren's Patents and Publications
Patents:
8,614,786 Robot for In-vacuum Use. Rob Lansbergen, Hilary Harrold, Matthew Van Doren
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7,869,003 Lithographic apparatus and device manufacturing method with reticle gripper.
Matthew J. Van Doren, Jonathon Feroce.
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6,876,453 (WO03102495) Metrology System for Precision 3D Motion, Matthew J. Van Doren, Michael Kuechel, Christopher Evans
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5,700,046 (WO9710082) Wafer Gripper, Matthew J. Van Doren, et al.
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5,733,024 (WO9711623) Modular System, Alexander Slocum, Matthew J. Van Doren, Don Sauer
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5,733,096 (WO9110078) Multi-Stage Telescoping Structure, Matthew J. Van Doren, Alexander Slocum, Don Sauer
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WO9710079 Concentric Dual Elbow, Matthew J. Van Doren
Selected Publications:
Van Doren, Matthew, Dornfeld, William, Marsh, Eric, “Flexure-based, Parallel Nano-Positioning Robot,” ASPE Annual Meeting, Nov 2011, Denver, CO.
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Marsh, Eric, Moerlein, Alex, Deakyne, Theodore, and Van Doren, Matthew, "In-Process
Measurement of Form Error and Force in Cylindrical Plunge Grinding," Precision Engineering, Volume 32, Issue 4, 10/2008. Pp. 348-352.
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Marsh, Eric, Arneson, Dave, Van Doren, Matthew, and Blystone, Scott, “Interferometric
Measurement of Workpiece Flatness in Ultra-Precision Flycutting” Sensor Review; Volume 26 Issue 3; 2006. Pp. 209-217.
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Marsh, Eric, Arneson, David, Van Doren, Matthew, Blystone, Scott, "The Effects of Spindle Dynamics on Precision Flycutting," American Society for Precision Engineering (ASPE) 2005 Annual Meeting.
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Pryor, Mitch, Van Doren, Matthew. “Manipulator Performance Criteria Based on Kinematic, Dyanmic, and Compliance Models” Proceedings of the 1999 ASME Design Engineering Technical Conference. Sept. 12-15, 1999, Las Vegas, Nevada.
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Van Doren, Matthew and Slocum, Alexander. “Design and Implementation of a Precision Material Handling Robot Control System” International Journal of Machine Tools and Manufacture: Design, Research, and Application. Vol. 35, No. 7. July, 1995. Pp. 1003-1014.
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Van Doren, Matthew. “Precision Machine Design for the Semiconductor Equipment Manufacturing Industry,” Ph.D. Thesis, Massachusetts Institute of Technology, May 1995.
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Van Doren, Matthew. “Development of a Precision Machine Design Methodology for the Semiconductor Equipment Manufacturing Industry” SEMATECH sponsored ARTWORK IV Conference, Cambridge, MA, October 21, 1993.
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Van Doren, Matthew. “Criteria Development Software to Support Decision Making Software for Modular, Reconfigurable Robotic Manipulators,” Report to DOE under Grant #DE-FG02-86NE37966, March, 1992.